Magnetostatic wave resonator capable of batch processing

Details Magnetostatic wave resonator capable of batch processing Magnetostatic wave resonator capable of batch processing

1986-03-18

1987-03-24

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156656, 1566611, 156664, C23F 102, B44C 122, C03C 1500

Patent

active

046523383

ABSTRACT:
In a batch process of manufacturing magnetostatic resonators, photolithographically etching a ferrimagnetic layer, that has been deposited on a dielectric substrate, to produce a plurality of disjoint blocks of ferrimagnetic material. Each block has a pair of sides that are substantially parallel for use in reflecting magnetostatic waves to form a resonator. A conductive layer is deposited on the wafer and then this layer is photolithographically etched to form a transducer adjacent to each of these reflecting sides.

REFERENCES:
patent: 4528529 (1985-07-01), Huijer

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