Magneto-optical recording medium having protective film with inc

Details Magneto-optical recording medium having protective film with inc Magneto-optical recording medium having protective film with inc

1990-01-18

1991-04-23

Niebling, John F.

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

2041922, C23C 1434

Patent

active

050097628

ABSTRACT:
A magneto-optical recording medium includes one selected from a compound of strontium titanate (SrTiOx), a compound of barium titanate (BaTiOx), a nitrogen compound of strontium titanate (SrTiOxNy), and a nitrogen compound of barium titanate (BaTiOxNy). The magneto-optical recording medium has a large value for the refractive index n and a small value for the extinction coefficient k; moreover, the medium is resistive against corrosions. For the magneto-optical recording medium, there is produced a protective film by simultaneously sputtering a film forming target and a composition adjusting target. The deposition of the protective film is achieved in a mixed atmosphere of an inert gas and oxygen or in a mixed gas of an inert gas and nitrogen.

REFERENCES:
patent: 4684454 (1987-08-01), Gardner
patent: 4725482 (1988-02-01), Komoda et al.
patent: 4735698 (1988-04-01), Nomura et al.
patent: 4888246 (1989-12-01), Kuwata et al.

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