Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
Reexamination Certificate
2007-07-10
2007-07-10
Wells, Nikita (Department: 2881)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With radio frequency antenna or inductive coil gas...
C250S42300F, C250S424000, C250S492210, C315S111810, C356S316000
Reexamination Certificate
active
10988745
ABSTRACT:
The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source.
REFERENCES:
patent: 7176469 (2007-02-01), Leung et al.
Boswell Roderick
Charles Christine
Keller John
Scipioni Lawrence
Smith Noel
FEI Company
Scheinberg Michael O.
Scheinberg & Griner LLP
Wells Nikita
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