Magnetically-assisted sputtering method for producing vertical r

Details Magnetically-assisted sputtering method for producing vertical r Magnetically-assisted sputtering method for producing vertical r

1983-10-28

1984-12-11

Demers, Arthur P.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204192R, 204298, C23C 1500

Patent

active

044876750

ABSTRACT:
Disclosed is a method for producing vertical recording media by using magnetically-assisted sputtering apparatus to sputter from a magnetic target while selected portions of the target are heated to a temperature at or above Curie. Also disclosed are improved means for supporting the magnetic target during sputtering which permits the realization of enhanced sputtering efficiencies.

REFERENCES:
patent: 4299678 (1981-11-01), Meckel
patent: 4324631 (1982-04-01), Meckel et al.
patent: 4414087 (1983-11-01), Meckel
Kadokura et al., IEEE Transactions on Magnetics, vol. MAG-17; No. 6; Nov. 1981.
Meckel et al., Research Disclosure, Oct. 1979, pp. 537-540.

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