Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1997-05-05
2000-03-14
Nguyen, Nam
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419212, 20419215, C23C 1434
Patent
active
060368241
ABSTRACT:
A process is provided for producing a thin-film magnetic longitudinal recording disk having a coercive anisotropy with a larger coercivity in a circumferential direction than in a radial direction of a disk. A substrate textured with circumferential grooves is provided. The textured substrate is then heated and a thin-film nucleating layer is sputtered above the textured substrate. Subsequently, a thin film magnetic layer of a hexagonal close-packed cobalt alloy is deposited above the nucleating layer.
REFERENCES:
patent: Re32464 (1987-07-01), Aine
patent: 3019125 (1962-01-01), Eggenberger et al.
patent: 3161946 (1964-12-01), Birkenbeil
patent: 3167449 (1965-01-01), Spacil
patent: 3294670 (1966-12-01), Charschan et al.
patent: 3342632 (1967-09-01), Bate et al.
patent: 3466156 (1969-09-01), Peters et al.
patent: 3472751 (1969-10-01), King
patent: 3515606 (1970-06-01), Crowther
patent: 3516860 (1970-06-01), Simmons
patent: 3520664 (1970-07-01), York
patent: 3521765 (1970-07-01), Kauffman et al.
patent: 3754178 (1973-08-01), Dormehl et al.
patent: 3761333 (1973-09-01), Kleinbeck
patent: 3787237 (1974-01-01), Grunberg et al.
patent: 3872786 (1975-03-01), Ballard
patent: 3968018 (1976-07-01), Lane et al.
patent: 3996095 (1976-12-01), Ahn et al.
patent: 4074016 (1978-02-01), Trippel
patent: 4079169 (1978-03-01), Nigh et al.
patent: 4152487 (1979-05-01), Yanagisawa
patent: 4236946 (1980-12-01), Aboaf et al.
patent: 4245008 (1981-01-01), Michaelsen et al.
patent: 4254189 (1981-03-01), Fisher
patent: 4277540 (1981-07-01), Aine
patent: 4287225 (1981-09-01), Kneller et al.
patent: 4303489 (1981-12-01), Morrison, Jr.
patent: 4313815 (1982-02-01), Graves, Jr. et al.
patent: 4326229 (1982-04-01), Yanagisawa
patent: 4333792 (1982-06-01), Smith
patent: 4411963 (1983-10-01), Aine
patent: 4414287 (1983-11-01), Kneller et al.
patent: 4426265 (1984-01-01), Brunsch et al.
patent: 4472259 (1984-09-01), Class et al.
patent: 4500407 (1985-02-01), Boys et al.
patent: 4503125 (1985-03-01), Nelson et al.
patent: 4514451 (1985-04-01), Suzuki et al.
patent: 4537832 (1985-08-01), Kohmoto et al.
patent: 4552820 (1985-11-01), Lin et al.
patent: 4554217 (1985-11-01), Grimm et al.
patent: 4568600 (1986-02-01), Ono et al.
patent: 4575408 (1986-03-01), Bok
patent: 4578729 (1986-03-01), Suzuki et al.
patent: 4604179 (1986-08-01), Eltoukhy et al.
patent: 4610911 (1986-09-01), Opfer et al.
patent: 4626336 (1986-12-01), Bloomquist et al.
patent: 4631612 (1986-12-01), Shiiki et al.
patent: 4639815 (1987-01-01), Arai et al.
patent: 4698251 (1987-10-01), Fukuda et al.
patent: 4735840 (1988-04-01), Hedgcoth
patent: 4749465 (1988-06-01), Flint et al.
patent: 4816127 (1989-03-01), Eltoukhy
patent: 4880514 (1989-11-01), Scott et al.
patent: 4894133 (1990-01-01), Hedgcoth
patent: 4950535 (1990-08-01), Arioka et al.
patent: 5082747 (1992-01-01), Hedgcoth
patent: 5316864 (1994-05-01), Hedgcoth
patent: 5626970 (1997-05-01), Hedgcoth
"Anisotropy in thin-film media--origins and applications (invited)", by W.G. Haines, J. Appl. Phys. 61 (8) Apr. 15, 1987.
"Influence of substrate texture on recording parameters for CoNiCr rigid disk media", by Seagle et al., J. Appl. Phys, 61 (8) Apr. 15, 1987.
"Circular Orientation in Sputtered Magnetic Disks", by Dr. R.G. Johanson, Circuits Processing Apparatus, Inc., Feb. 10, 1986.
Microstructure and Crystallography of Textured CoCrTa/Cr Recording Media, by T.P. Nolan and R. Sinclair, Ultramicroscopy 47 (1992) pp. 437-446, North-Holland.
Transmission Electron Microscopic Analysis of Microstructural Features in Magnetic Recording Media, by T.P. Nolan and R. Sinclair et al., IEEE Transactions on Magnetics, vol. 29, No. 1, Jan. 1993.
Crystallographic Orientation of Textured CoCrTa/Cr Sputtered Thin Film Media for Longitudinal Recording, by T.P. Nolan and R. Sinclair et al., J.Appl.Phys. 73(10) May 15, 1993, pp. 1517-1524.
Mitsubishi v. Hedgcoth, USDC Northern District of CA, C-95-20800-JW, Order Re Patent Claims, Apr. 17, 1996.
Mitsubishi v. Hedgcoth, USDC Northern District of CA, C-95-20800-JW, Declaration of John Corbani Apr. 29, 1996.
In-Plane Anisotropy in Thin-Film Media: Physical Origins of Orientation Ratio (Invited), by Johnson et al., IEEE Transactions on Magnetics, vol. 31, No. 6, Nov. 1995.
Mitsubishi v. Hedgcoth, U.S.D.C. N. District of CA, C95-20800 JW, Recommendations of the Special Master Regarding Motions for Summary Judgment, May 17, 1996.
Mitsubishi v. Hedgcoth, U.S.D.C. N. District of CA, C95-20800 JW, Tentative Ruling re Motion for Clarification of Order, May 2, 1996.
Mitsubishi v. Hedgcoth, U.S.D.C. N. District of CA, C95-20800 JW, Defendant Hedgcoth's Memo of Points and Authorities in Opposition to Plaintiffs' Motion for Summary Judgement or Invalidity of U.S.P. Nos. 4,735,840, 4,894,134, 5,082,747, and 5,136,863, Apr. 29, 1996.
TriMedia GS Series, 1985.
Surface Analysis Service Report, Surface Science Laboratories, Inc., Feb. 10, 1984.
Cyberdisk Competitor Analysis, by Alcan International Limited, Oct. 11, 1985.
Thin film for magnetic recording technology: A review by J. Howard, Journal of Vacuum Science and Technology, 2nd Series, vol. 4, No. 1, Jan./Feb. 1986.
Xerox Magnetics, 1983.
Effect of Microstructural Features on Media Noise in Longitudinal Recording Media, by T.P. Nolan and R. Sinclair et al., J.App.Phys. 73(10) May 15, 1993, pp. 5566-5568.
Stress-Induced anisotropy in Co-Cr thin films, by P. Mitchell et al., J. Appl. Phys. 63(8), Apr. 1988.
Microstructure and Magnetic Properties of Thin-Film Co-Ni-Pt for Longitudinal Recording, by N. Mahvan et al.m, IEEE Transactions on Magnetics, vol. 26, No. 5, Sep. 1990.
Influence of substrate texture on recording parameters for CoNiCr rigid disk media, by D. Seagle et al., J. Appl. Phys. 61(8) Apr. 15, 1987.
The Relationship of Switching Distribution to Tape Digital Output, by D. Richards et al., J. App. Phys. 49(3) 1978.
E. Teng et al. IEEE Transactions on Magnetics, vol. MAGk-22, No. 1, Sep. 1986 Magnetic Anisotropies in Sputtered Thin Film Disks, by S. Uchinami, IEEE Transactions on Magnetics, vol. MAG-23, No. 5, Sep. 1987.
Mitsubishi v. Hedgcoth, U.S.D.C. N. District of CA, C95-280800 JW, Defendant's Reply Brief and Opposition to Plaintiffs' Motion for Summary Judgment, Sep. 28, 1995.
Mitsubishi v. Hedgcoth, U.S.D.C. N. District of CA, C94-1971 SAW (JSB), Plaintiff's Pretrial Brief.
Mitsubishi v. Hedgcoth, U.S.D.C. N. District of CA, C94-1971 SAW (JSB), Defendant's Reply Brief to Plaintiff's Opposition to Def. Hedgcoth's Motion for Summary Judgment, Apr. 29, 1996.
Electron microscopy investigations of the structure and properties of thin film rigid disks, by D.R. Srinivasan et al., Journal of Magnetism and Magnetic Materials, 113 (1992) 47-57.
Microstructure and magnetic properties of very thin CoCr films deposited on different underlayers by rf-sputtering, by G. Pan et al., Journal of Magnetism and Magnetic Materials 113 (1992) 21-28.
Microstructural origin of in-plane magnetic anisotropy in magnetron in-line sputtered CoPtCr thin film disks, by M. Kim et al., American Institute of Physics 1993.
"Introduction to Solid State Physics", by Ch. Kittel, John Wiley & Sons, 1956, one (1) page.
American National Standards Institute, ANSI X3.120-1984, Contact start-stop storage disk--95840 flux transitions per track 7.874-in (200-mm) outer diameter and 2.500-in (63.5-mm) inner diameter.
American National Standards Institute, ANSI X3.128-1986, Contact start-stop storage disk--83000 flux transitions per track 130-mm (5.118-inc) outer diameter and 40-mm (1.575-in) inner diameter.
SEMI 1985, D1-85, Specification for physical and mechanical characteristics of 40mm .times.130mm finished nickel plated substrates for rigid disks.
SEMI 1986, 1987, D2-86, Semi specification for aluminum substrates for rigid disks.
Handbook of Thin Film Technology, by Maissel et al., Chapter 6, 1970, 1983 Reissue.
"Sputtering Increases Advantages of Thin-Film Media", by N. Mackintosh et al., Computer Technology Review, Dec. 18, 1984).
"Coating Magnetic Storage Disks", by D. Rogalla, IBM Technical Disclosure Bulletin, Apr. 1969.
Experimental Studies Using In
Magnetic Media Development LLC
Nguyen Nam
VerSteeg Steven H.
LandOfFree
Magnetic recording disk sputtering process and apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Magnetic recording disk sputtering process and apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Magnetic recording disk sputtering process and apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-165466