Magnetic MEMS sensor device

Details Magnetic MEMS sensor device Magnetic MEMS sensor device

2005-01-05

2008-11-18

Nguyen, Vincent Q. (Department: 2831)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S207130, C324S207220, C324S207230

Reexamination Certificate

active

07453269

ABSTRACT:
A microelectromechanical system (MEMS) sensor and method for measuring the motion of an intermediate member and a method for making the MEMS sensor. The MEMS sensor includes a substrate, a lower magnetic member disposed on the substrate, a layer disposed over the substrate, an upper magnetic member disposed at a side of the layer facing the lower magnetic member, an intermediate magnetic member magnetically levitated between the lower magnetic member and upper magnetic member; and a component measuring at least one of motion, forces acting on, and a displacement of the intermediate magnetic member.

REFERENCES:
patent: 4997521 (1991-03-01), Howe et al.
patent: 5015906 (1991-05-01), Cho et al.
patent: 5396136 (1995-03-01), Pelrine
patent: 5965968 (1999-10-01), Robert et al.
patent: 6049148 (2000-04-01), Nichols et al.
patent: 6208497 (2001-03-01), Seale et al.
patent: 6216571 (2001-04-01), Newell et al.
patent: 6307285 (2001-10-01), Delson et al.
patent: 6497141 (2002-12-01), Turner et al.
patent: 6534887 (2003-03-01), Peczalski et al.
patent: 6566775 (2003-05-01), Fradella
patent: 6770993 (2004-08-01), Heshmat et al.

Affiliated with

Also associated with

Rating

Magnetic MEMS sensor device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Magnetic MEMS sensor device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Magnetic MEMS sensor device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4034687