Magnetic lens system for corpuscular radiation equipment

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens

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250397, G01N 2300

Patent

active

042141664

ABSTRACT:
A magnetic lens system for corpuscular radiation equipment operating in a vacuum, in particular, an objective lens system for electron microscopes, comprising a superconducting shield housing, in which are arranged, at one end, a single hollow cylindrical superconducting shielding device, wound with a lens coil, and at the other end, in front of the free end face of the shielding device, a vacuum chamber for accommodating an object to be examined, permitting the cavity to be relatively large, and detectors for radiation analysis to be arranged therein so that the lens system is therefore suitable for use in scanning electron microscopes.

REFERENCES:
patent: 3008044 (1961-11-01), Buchhold
patent: 3351754 (1967-11-01), Dietrich et al.
patent: 3916201 (1975-10-01), Herrmann et al.
patent: 3942005 (1976-03-01), Watanabe

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