Magnetic head and method of making the same using an...

Details Magnetic head and method of making the same using an... Magnetic head and method of making the same using an...

2006-02-28

2006-02-28

Duda, Kathleen (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

C430S324000

Reexamination Certificate

active

07005242

ABSTRACT:
A read sensor and method of making the same using an etch-stop layer are disclosed. The method is particularly suitable in connection with techniques requiring the partial removal of the capping layer, such as exchange tab (ET) and lead overlay (LOL) techniques. Basically, a thin “etch-stop” layer is deposited over a top free layer of sensor materials. The etch-stop layer is made of a suitable material such as copper-oxide (CuO) or nickel-iron-chromium (NiFeCr). A tantalum (Ta) capping layer is then deposited over the etch-stop layer. When appropriate, top edge portions of the capping layer are exposed to a reactive ion etch (RIE) using a fluorine gas for removal. Advantageously, the etch-stop layer significantly reduces or eliminates damage to the free layer that would otherwise occur due to the fluorine gas RIE.

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