Magnetic fluid pump and a method for transporting fluid using th

Details Magnetic fluid pump and a method for transporting fluid using th Magnetic fluid pump and a method for transporting fluid using th

1995-02-24

1996-03-26

Berisch, Richard A.

Pumps

Motor driven

Electric or magnetic motor

417417, 417419, 417 53, F04B 1700, F04B 3504

Patent

active

055015816

ABSTRACT:
A magnetic fluid pump prevents the generation of particles and impurities, and is useful where particles and impurities are to be kept to a minimum, for instance in a resist coating process for manufacturing a semiconductor device. A pair of solenoid coils are wound on the outer surface of both of the ends of a a fluid transporting pipe. Inside the transporting pipe is a magnetic cylinder having a valve attached to one end which opens and closes the fluid path. The magnetic cylinder reciprocates back and forth inside the transfer pipe by changing the current direction of the coils. Fluid can be pumped continuously by reciprocation of the magnetic cylinder. The pump suppresses the generation of particles and impurities. When used in a resist coating process, the formation of a resist pattern having a poor profile during the photolithography processing can be prevented.

REFERENCES:
patent: 2761392 (1956-09-01), Parker
patent: 3384021 (1968-05-01), Perron
patent: 3836289 (1974-09-01), Wolford et al.
patent: 4416591 (1983-11-01), Horwinski

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