Electric lamp and discharge devices – With magnetic device
Patent
1994-12-27
1996-08-20
Patel, Nimeshkumar D.
Electric lamp and discharge devices
With magnetic device
313 7, 313442, 313443, 313310, 315 85, H01J 320
Patent
active
055481833
ABSTRACT:
In a magnetic field immersion type electron gun for controlling an electron beam emitted by an electron gun (51) with the use of an electric lens (56) and a magnetic field lens formed by permanent magnets (57, 58) of a coaxial ion pump (53), the ion pump magnets are a pair of cylindrical permanent magnets (57, 58) disposed coaxially with an optical axis (52) of the electron gun (51) in such a way as to sandwich a cylindrical ion pump anode (61) of the coaxial ion pump; the two permanent magnets are magnetized in a mutually opposing direction; a hollow cylindrical yoke (60) is disposed also coaxially with the optical axis (52) in such a way as to enclose the two permanent magnets (57, 58) within a hollow portion thereof; and the yoke (60) is formed with an annular yoke gap (63) in a radially inner circumferential surface of the yoke (60) to leak out a magnetic flux flowing through the yoke toward the optical axis. In the above-mentioned construction, the magnetic field lens can be formed efficiently with the use of the magnetic field generated by the permanent magnets for constituting the coaxial ion pump, and further the formed magnetic field lens can be superimposed upon the electron gun. Therefore, an electric field immersion type electron gun of high performance can be obtained, and further the electron gun chamber can be efficiently evacuated in the vicinity of the cathode tip of the electron gun.
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Yamazaki et al; "Development of the field emission electron gun integrated in the sputter ion pump"; 82576 Journal of Vacuum Science & Technology B 9 (1991) Nov./Dec., No. 6.
Troyon; "High current efficiency field emission gun system incorporating a preaccelerator magnetic lens"; Optik 57, No. 3 (1980), pp. 401-410.
Miyoshi Motosuke
Okumura Katsuya
Yamazaki Yuichiro
Kabushiki Kaisha Toshiba
Patel Nimeshkumar D.
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