Magnetic electron lens

Details Magnetic electron lens Magnetic electron lens

1979-03-28

1980-08-26

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250311, G01N 2300

Patent

active

042197325

ABSTRACT:
In a scanning electron microscope, an objective lens field is generated between a pair of deflecting coils and a specimen by an objective lens having upper and lower magnetic pole pieces. A supplemental magnetic pole piece is installed between said upper and lower magnetic pole pieces so that the half width of the objective lens axial magnetic field distribution is increased and the principal plane of the objective lens is positioned near the lower pole piece. By so doing, the spherical aberration coefficient of the objective lens is reduced and a high resolution scanning image is obtained.

REFERENCES:
patent: 2714678 (1955-08-01), Wolff
patent: 2859363 (1958-11-01), Leisegang et al.
patent: 3100260 (1963-08-01), Wilska
patent: 3717761 (1973-02-01), Koike et al.

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