Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1982-08-02
1984-01-24
Smith, Alfred E.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
315 31R, 313336, 313446, 313448, G01N 23225, H01J 1924, H01J 1932, H01J 2946
Patent
active
044278861
ABSTRACT:
A field emission electron gun (10) is disclosed which has an extraction electrode, composed of one or more sharply pointed electrode tips (17) in close proximity to a field emission cathode tip (11), such that a relatively low voltage between the cathode tip (11) and the extraction electrode tips (17), in the range of 100 to 2000 volts, will cause field emission of electrons from the cathode tip due to the extremely high localized electric field at the cathode tip. The electrons in the beam extracted from the cathode (11) are at a relatively low kinetic energy, particularly adapting the beam for use in such applications as low energy electron microscopy and low energy electron diffraction. For such applications, the extracted beam is generally passed through a limiting aperture member (21), electrostatic lenses (24, 25), and a deflection coil (26) when scanning of the target (27) is desired.
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Lagally Max G.
Martin Joe A.
Berman Jack I.
Smith Alfred E.
Wisconsin Alumni Research Foundation
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