Low temperature zirconia based thermal barrier layer by PVD

Details Low temperature zirconia based thermal barrier layer by PVD Low temperature zirconia based thermal barrier layer by PVD

2008-07-29

2008-07-29

McDonald, Rodney G (Department: 1795)

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

C204S192160, C204S192220

Reexamination Certificate

active

10291179

ABSTRACT:
Formation of a zirconia based thermal barrier layer is described. In accordance with the present invention, a thermal barrier layer composed of zirconia or an allow of zirconia is presented. An advantageous layer might be composed of zirconia or an alloy of zirconia with silica having improved properties. In some embodiments, such a zirconia layer might be deposited with a fraction of it's zirconia in a metallic state. Such a fraction, particularly if it were very low, would act to nucleate crystalline grains of silicon during the recrystallization phase of excimer laser melting due to the formation of point defects of zirconium silicide or other nucleating compound or formation. Heat treating the Zirconia layer anneals the Zirconia layer so that it can act as a gate oxide.

REFERENCES:
patent: 3309302 (1967-03-01), Heil
patent: 3616403 (1971-10-01), Collins et al.
patent: 3850604 (1974-11-01), Klein
patent: 4082569 (1978-04-01), Evans, Jr.
patent: 4111523 (1978-09-01), Kaminow et al.
patent: 4437966 (1984-03-01), Hope et al.
patent: 4587225 (1986-05-01), Tsukuma et al.
patent: 4619680 (1986-10-01), Nourshargh et al.
patent: RE32449 (1987-06-01), Claussen et al.
patent: 4710940 (1987-12-01), Sipes, Jr.
patent: 4785459 (1988-11-01), Baer
patent: 4915810 (1990-04-01), Kestigian et al.
patent: 4978437 (1990-12-01), Wirz
patent: 5085904 (1992-02-01), Deak et al.
patent: 5107538 (1992-04-01), Benton et al.
patent: 5119460 (1992-06-01), Bruce et al.
patent: 5173271 (1992-12-01), Chen et al.
patent: 5174876 (1992-12-01), Buchal et al.
patent: 5196041 (1993-03-01), Tumminelli et al.
patent: 5200029 (1993-04-01), Bruce et al.
patent: 5206925 (1993-04-01), Nakazawa et al.
patent: 5225288 (1993-07-01), Beeson et al.
patent: 5237439 (1993-08-01), Misono et al.
patent: 5252194 (1993-10-01), Demaray et al.
patent: 5287427 (1994-02-01), Atkins et al.
patent: 5296089 (1994-03-01), Chen et al.
patent: 5303319 (1994-04-01), Ford et al.
patent: 5306569 (1994-04-01), Hiraki
patent: 5309302 (1994-05-01), Vollmann
patent: 5338625 (1994-08-01), Bates et al.
patent: 5355089 (1994-10-01), Treger
patent: 5381262 (1995-01-01), Arima et al.
patent: 5427669 (1995-06-01), Drummond
patent: 5433835 (1995-07-01), Demaray
patent: 5435826 (1995-07-01), Sakakibara et al.
patent: 5457569 (1995-10-01), Liou et al.
patent: 5472795 (1995-12-01), Atita
patent: 5475528 (1995-12-01), LaBorde
patent: 5478456 (1995-12-01), Humpal et al.
patent: 5483613 (1996-01-01), Bruce et al.
patent: 5499207 (1996-03-01), Miki et al.
patent: 5512147 (1996-04-01), Bates et al.
patent: 5538796 (1996-07-01), Schaffer et al.
patent: 5555127 (1996-09-01), Abdelkader et al.
patent: 5561004 (1996-10-01), Bates et al.
patent: 5563979 (1996-10-01), Bruce et al.
patent: 5565071 (1996-10-01), Demaray et al.
patent: 5569520 (1996-10-01), Bates
patent: 5591520 (1997-01-01), Migliorini et al.
patent: 5597660 (1997-01-01), Bates et al.
patent: 5603816 (1997-02-01), Demaray et al.
patent: 5607560 (1997-03-01), Hirabayashi et al.
patent: 5607789 (1997-03-01), Treger et al.
patent: 5612152 (1997-03-01), Bates
patent: 5613995 (1997-03-01), Bhandarkar et al.
patent: 5645626 (1997-07-01), Edlund et al.
patent: 5654054 (1997-08-01), Tropsha et al.
patent: 5654984 (1997-08-01), Hershbarger et al.
patent: 5686360 (1997-11-01), Harvey, III et al.
patent: 5689522 (1997-11-01), Beach
patent: 5693956 (1997-12-01), Shi et al.
patent: 5702829 (1997-12-01), Paidassi et al.
patent: 5718813 (1998-02-01), Drummond
patent: 5719976 (1998-02-01), Henry et al.
patent: 5731661 (1998-03-01), So et al.
patent: 5738731 (1998-04-01), Shindo et al.
patent: 5755938 (1998-05-01), Fukui et al.
patent: 5757126 (1998-05-01), Harvey, III et al.
patent: 5762768 (1998-06-01), Goy et al.
patent: 5771562 (1998-06-01), Harvey, III et al.
patent: 5792550 (1998-08-01), Phillips et al.
patent: 5811177 (1998-09-01), Shi et al.
patent: 5830330 (1998-11-01), Lantsman
patent: 5831262 (1998-11-01), Greywall et al.
patent: 5841931 (1998-11-01), Foresi et al.
patent: 5847865 (1998-12-01), Gopinath et al.
patent: 5849163 (1998-12-01), Ichikawa et al.
patent: 5853830 (1998-12-01), McCaulley et al.
patent: 5855744 (1999-01-01), Halsey et al.
patent: 5870273 (1999-02-01), Sogabe et al.
patent: 5882946 (1999-03-01), Otani
patent: 5900057 (1999-05-01), Buchal et al.
patent: 5909346 (1999-06-01), Malhotra et al.
patent: 5930046 (1999-07-01), Solberg et al.
patent: 5930584 (1999-07-01), Sun et al.
patent: 5942089 (1999-08-01), Sproul et al.
patent: 5948215 (1999-09-01), Lantsman
patent: 5952778 (1999-09-01), Haskal et al.
patent: 5961682 (1999-10-01), Lee et al.
patent: 5966491 (1999-10-01), DiGiovanni
patent: 5977582 (1999-11-01), Fleming et al.
patent: 6000603 (1999-12-01), Koskenmaki et al.
patent: 6001224 (1999-12-01), Drummond et al.
patent: 6004660 (1999-12-01), Topolski et al.
patent: 6024844 (2000-02-01), Drummond et al.
patent: 6045626 (2000-04-01), Yano et al.
patent: 6046081 (2000-04-01), Kuo
patent: 6051114 (2000-04-01), Yao et al.
patent: 6051296 (2000-04-01), McCaulley et al.
patent: 6052397 (2000-04-01), Jeon et al.
patent: 6057557 (2000-05-01), Ichikawa
patent: 6058233 (2000-05-01), Dragone
patent: 6071323 (2000-06-01), Kawaguchi
patent: 6077642 (2000-06-01), Ogata et al.
patent: 6080643 (2000-06-01), Noguchi et al.
patent: 6093944 (2000-07-01), VanDover
patent: 6106933 (2000-08-01), Nagai et al.
patent: 6117279 (2000-09-01), Smolanoff et al.
patent: 6117345 (2000-09-01), Liu et al.
patent: 6133670 (2000-10-01), Rodgers et al.
patent: 6146225 (2000-11-01), Sheats et al.
patent: 6154582 (2000-11-01), Bazylenko et al.
patent: 6157765 (2000-12-01), Bruce et al.
patent: 6162709 (2000-12-01), Raoux et al.
patent: 6165566 (2000-12-01), Tropsha
patent: 6168884 (2001-01-01), Neudecker et al.
patent: 6176986 (2001-01-01), Watanabe et al.
patent: 6197167 (2001-03-01), Tanaka
patent: 6198217 (2001-03-01), Suzuki et al.
patent: 6204111 (2001-03-01), Uemoto et al.
patent: 6210544 (2001-04-01), Sasaki
patent: 6214660 (2001-04-01), Uemoto et al.
patent: 6232242 (2001-05-01), Hata et al.
patent: 6236793 (2001-05-01), Lawrence et al.
patent: 6242129 (2001-06-01), Johnson
patent: 6242132 (2001-06-01), Neudecker et al.
patent: 6248291 (2001-06-01), Nakagama et al.
patent: 6248640 (2001-06-01), Nam
patent: 6261917 (2001-07-01), Quek et al.
patent: 6268695 (2001-07-01), Affinito
patent: 6280585 (2001-08-01), Obinata et al.
patent: 6280875 (2001-08-01), Kwak et al.
patent: 6281142 (2001-08-01), Basceri et al.
patent: 6287986 (2001-09-01), Mihara
patent: 6288835 (2001-09-01), Nilsson et al.
patent: 6290821 (2001-09-01), McLeod
patent: 6290822 (2001-09-01), Fleming et al.
patent: 6300215 (2001-10-01), Shin
patent: 6302939 (2001-10-01), Rabin et al.
patent: 6306265 (2001-10-01), Fu et al.
patent: 6344419 (2002-02-01), Forster et al.
patent: 6350353 (2002-02-01), Gopalraja et al.
patent: 6356694 (2002-03-01), Weber
patent: 6358810 (2002-03-01), Dornfest et al.
patent: 6361662 (2002-03-01), Chiba et al.
patent: 6365300 (2002-04-01), Ota et al.
patent: 6365319 (2002-04-01), Heath et al.
patent: 6376027 (2002-04-01), Lee et al.
patent: 6391166 (2002-05-01), Wang
patent: 6409965 (2002-06-01), Nagata et al.
patent: 6413382 (2002-07-01), Wang et al.
patent: 6413645 (2002-07-01), Graff et al.
patent: 6416598 (2002-07-01), Sircar
patent: 6423776 (2002-07-01), Akkapeddi et al.
patent: 6433380 (2002-08-01), Shin
patent: 6444104 (2002-09-01), Gopalraja et al.
patent: 6444750 (2002-09-01), Touhsaent
patent: 6452717 (2002-09-01), Endo
patent: 6488822 (2002-12-01), Moslehi
patent: 6497598 (2002-12-01), Affinito
patent: 6506289 (2003-01-01), Demaray et al.
patent: 6511615 (2003-01-01), Dawes et al.
patent: 6522067 (2003-02-01), Graff
patent: 6533907 (2003-03-01), Demaray et al.
patent: 6537428 (2003-03-01), Xiong et al.
patent: 6558836 (2003-05-01), Whitacre et al.
patent: 6563998 (2003-05-01), Farah et al.
patent: 6570325 (2003-05-01), Graff
patent: 6576546 (2003-06-01), Gilbert et al.
patent: 6602338 (2003-08-01), Chen et al.
patent: 6605228 (2003-08-01), Kawaguchi et al.
patent: 6615614 (2003-09-01), Makikawa et al.
patent: 663

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