Low temperature plasma generator with minimal RF emissions

Details Low temperature plasma generator with minimal RF emissions Low temperature plasma generator with minimal RF emissions

1988-04-19

1990-09-11

LaRoche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511151, 31323141, 333 25, 343859, H01J 724, H01J 1726, H05B 3126, H01Q 310

Patent

active

049565826

ABSTRACT:
A low temperature plasma generator having reduced radio frequency (RF) emissions, and a method for reducing the RF emissions of a plasma generator. A low temperature plasma generator (100) includes a pair of electrodes (150 and 160) that are energized by an RF power supply (138) through a balanced impedance matching network (200). The impedance matching network includes a balun transformer (158), matched variable inductors (222 and 230), a fixed capacitor (240) in parallel with a variable capacitor (244) and a fixed capacitor (242) in parallel with a variable capacitor (246). The RF potential on electrodes (150 and 160) varies sinusoidally between opposite positive and negative values with respect to ground potential, such that the net potential on the two electrodes with respect to ground is always substantially equaol to zero, thus eliminating a glow discharge current and radiation emissions that otherwise are produced by similar prior art low temperature plasma generators.

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