Low temperature growth of oriented carbon nanotubes

Details Low temperature growth of oriented carbon nanotubes Low temperature growth of oriented carbon nanotubes

2005-07-06

2011-10-11

Hendricks, Keith (Department: 1724)

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

C204S298110, C204S192150

Reexamination Certificate

active

08034218

ABSTRACT:
The invention concerns a method for growing oriented carbon nanotubes on a sample using a target of carbon or a variety of carbon in a deposition chamber where a plasma predominates. The sample (16) is arranged in contact with the target (15), in such a way that the target has a free surface and that the sample offers a free surface, the plasma causing the growth of carbon nanotubes on the free surface of the sample.

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