Low temperature diffusion process for dopant concentration enhan

Details Low temperature diffusion process for dopant concentration enhan Low temperature diffusion process for dopant concentration enhan

1997-12-09

2000-05-02

Chaudhari, Chandra

Semiconductor device manufacturing: process

Introduction of conductivity modifying dopant into...

Diffusing a dopant

438249, 438561, 438563, 438920, H01L 2138

Patent

active

060572167

ABSTRACT:
Doped semiconductor with high dopant concentrations in small semiconductor regions without excess spreading of the doped region are formed by:

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