Low pressure sensor device with high accuracy and high...

Details Low pressure sensor device with high accuracy and high... Low pressure sensor device with high accuracy and high...

2011-08-16

2011-08-16

Allen, Andre (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

07997142

ABSTRACT:
Pressure non-linearity in a low pressure sensor device formed from a silicon diaphragm with an embedded piezoresistive transducer is reduced by using a shallow boss or thin stiffener on an ultra-thin diaphragm while the pressure sensitivity of the device is increased with corner trenches.

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ELMOS-SMI Pressure Sensor Device, ELMOS Semiconductor AG (MEMS Sensors) website, date unknown.

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