Low power gas detector

Details Low power gas detector Low power gas detector

1984-02-07

1986-04-08

Miles, Tim

Measuring and testing

Gas analysis

Gas chromatography

338 34, G01N 2712

Patent

active

045804397

ABSTRACT:
A gas detector includes a gas detecting element comprised of a metal oxide semiconductor material which changes its value of electrical resistance at an elevated temperature when it absorbs a gas. In one form, the gas detecting element is supported in the form of a bridge so as to increase its response speed by making thermal capacity as small as possible. In another form, the gas detecting element is supported in the form of a cantilever, more preferably in the form of a ring as formed along the periphery of a overhang portion of a disc-shaped layer of electrically insulating material. Also provided is a process for manufacturing a thin film of metal oxide, which may be advantageously used as a gas detecting element of a gas detector or a transparent electrode, for example, in a liquid crystal panel.

REFERENCES:
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patent: 4224595 (1980-09-01), Dolan
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patent: 4361026 (1982-11-01), Muller et al.
patent: 4413502 (1983-11-01), Ohta et al.
patent: 4453397 (1984-06-01), Ohta et al.
patent: 4471647 (1984-09-01), Jerman et al.
patent: 4478077 (1984-10-01), Bohrer et al.
patent: 4485667 (1984-12-01), Lalauze et al.

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