Low pass filter for plasma discharge

Details Low pass filter for plasma discharge Low pass filter for plasma discharge

1992-10-22

1994-04-12

Pascal, Robert J.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511171, 31511181, 31323131, 333 99PL, H01J 724

Patent

active

053028821

ABSTRACT:
An isolator is disposed between a plasma reactor and its electrical energy source in order to isolate the reactor from the electrical energy source. The isolator operates as a filter to attenuate the transmission of harmonics of a fundamental frequency of the electrical energy source generated by the reactor from interacting with the energy source. By preventing harmonic interaction with the energy source, plasma conditions can be readily reproduced independent of the electrical characteristics of the electrical energy source and/or its associated coupling network.

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