Low metal ion containing 4,4'-[1-[4-[1-(4-Hydroxyphenyl)-1-methy

Details Low metal ion containing 4,4'-[1-[4-[1-(4-Hydroxyphenyl)-1-methy Low metal ion containing 4,4'-[1-[4-[1-(4-Hydroxyphenyl)-1-methy

1995-09-28

1997-08-12

Chu, John S.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430168, 430169, 430325, 430326, 430330, 210681, 210683, 210685, 438948, G03C 556, C02F 142, H01L 21312

Patent

active

056564139

ABSTRACT:
The present invention provides methods for producing TPPA having low level of metal ions, utilizing treated ion exchange resins. A method is also provided for producing photoresist composition having a very low level of metal ions from such TPPA for producing semiconductor devices using such photoresist compositions.

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