Low inductance large area coil for an inductively coupled plasma

Details Low inductance large area coil for an inductively coupled plasma Low inductance large area coil for an inductively coupled plasma

1995-06-30

1999-02-23

Paschall, Mark H.

Electric heating

Metal heating

By arc

21912157, 21912141, 156345, 118723I, 20429808, B23K 1000

Patent

active

058747044

ABSTRACT:
A low inductance large area coil (LILAC) is provided as a source for generating a large area plasma. The LILAC comprises at least two windings which, when connected to an RF source via impedance matching circuitry, produce a circulating flow of electrons to cause a magnetic field in the plasma. Because the LILAC employs multiple windings, few turns of winding are required to obtain a large area coil, so that the inductance of the LILAC is low. The low inductance of the LILAC ensures that the self-resonating frequency of the LILAC is kept at a level far above the RF driving frequency, allowing a broad frequency range for impedance matching. Thus, there is no difficulty in impedance matching, and power transfer can be maximized, permitting efficient generation of a large area plasma.

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