Low gate resistance high-speed MOS-technology integrated structu

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257754, 257757, 257768, 257336, 257344, H01L 2978, H01L 2348, H01L 2946, H01L 2962

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active

058834125

ABSTRACT:
A high-speed MOS-technology power device integrated structure includes a plurality of elementary functional units formed in a lightly doped semiconductor layer of a first conductivity type, the elementary functional units including channel regions of a second conductivity type covered by a conductive insulated gate layer including a polysilicon layer; the conductive insulated gate layer also including a highly conductive layer superimposed over the polysilicon layer and having a resistivity much lower than the resistivity of the polysilicon layer, so that a resistance introduced by the polysilicon layer is shunted with a resistance introduced by the highly conductive layer and the overall resistivity of the conductive insulated gate layer is lowered.

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