Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Patent
1998-03-11
2000-10-24
Clark, Sheila V.
Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified material other than unalloyed aluminum
257768, 257751, H01L 2348, H01L 2352, H01L 2940
Patent
active
061371807
ABSTRACT:
Disclosed is a low cost contact and interconnect layer and method for fabricating the same. A contact via is opened within an insulating layer, exposing a circuit node (e.g., transistor active area within a semiconductor substrate). The via is filled with a chemical vapor deposited (CVD) titanium silicide layer, forming electrical contact with the circuit node. The silicide layer may simultaneously form the interconnect layer for one embodiment. In other embodiments, the interconnect layer may comprise a metal strap over the titanium silicide layer, or a metal layer over an etched-back titanium silicide plug in the contact via. For any of these embodiments, the contact via may be opened after the formation of interconnect trenches, the via extending from the bottom of a trench to the circuit node. CVD provides good step coverage of the via within the trench, despite the higher aspect ratio. The interconnect layer is deposited and etched back, such that the interconnect lines are defined by the trenches.
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Sandhu Gurtej S.
Sharan Sujit
Clark Sheila V.
Micro)n Technology, Inc.
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