Coherent light generators – Particular active media – Semiconductor
Reexamination Certificate
2006-04-18
2006-04-18
Deo, Duy-Vu N. (Department: 1765)
Coherent light generators
Particular active media
Semiconductor
C372S046012, C372S096000, C438S718000
Reexamination Certificate
active
07031363
ABSTRACT:
A process for making a laser structure. The process is for the fabrication of a laser device such a vertical cavity surface emitting laser (VCSEL). The structures made involve dielectric and spin-on material planarization over wide and narrow trenches, coplanar contacts, non-coplanar contacts, thick and thin pad dielectric, air bridges and wafer thinning.
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Chemla et
Biard James R.
Johnson Klein L.
Johnson Ralph H.
Park Gyoungwon
Wang Tzu-Yu
Deo Duy-Vu N.
Finisar Corporation
Workman Nydegger
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