Long life X-ray source target

Details Long life X-ray source target Long life X-ray source target

1987-10-13

1990-01-23

Church, Craig E.

X-ray or gamma ray systems or devices

Specific application

Lithography

378119, 378125, 378126, G21K 500

Patent

active

048963410

ABSTRACT:
Disclosed herein is an X-ray lithography system having a long life target. The life of the conventional target in X-ray generating systems for use in X-ray lithography systems is increased by providing means by which a single laser pulse can be provided to the same spot a plurality of times. In addition, new target designs are provided which are mechanically moved to allow laser pulses to be provided to adjacent points over a large surface area. One type of target is a cylindrical drum which is helically rotated to allow the laser pulse to intersect at all points along the helix of the drum. A second type of long life target is a long continuous strip in which a strip is moved from a feed reel to a take-up reel. The strip may be within a cassette.

REFERENCES:
patent: 3825786 (1974-07-01), Einighammer et al.
patent: 4184078 (1980-01-01), Nagel et al.
patent: 4281269 (1981-07-01), Ledley
patent: 4700371 (1987-10-01), Forsyth et al.
"Target-Interaction Experiments at 0.53 .mu.m and 0.35 .mu.m" by Nagel et al., Lawrence Livermore Nat. Labs., 1980, Ann. Reports.
"Characteristics of Soft X-Ray Emission . . . by Moderate-Intensity Laser Irradiation of a Target" by Bykovskii et al., Sov. J. Quantum Electron., 9(2), 2-1979.

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