X-ray or gamma ray systems or devices – Specific application – Lithography
Patent
1984-11-08
1987-10-13
Church, Craig E.
X-ray or gamma ray systems or devices
Specific application
Lithography
378119, 2504922, G21I 504
Patent
active
047003715
ABSTRACT:
Disclosed herein is an X-ray lithography system having a long life target. The life of the conventional target in X-ray generating systems for use in X-ray lithography systems is increased by providing means by which a single laser pulse can be provided to the same spot a plurality of times. In addition, new target designs are provided which are mechanically moved to allow laser pulses to be provided to adjacent points over a large surface area. One type of target is a cylindrical drum which is helically rotated to allow the laser pulse to intersect at all points along the helix of the drum. A second type of long life target is a long continuous strip in which a strip is moved from a feed reel to a take-up reel. The strip may be within a cassette.
REFERENCES:
patent: 4058486 (1977-11-01), Mallozzi et al.
patent: 4184078 (1980-01-01), Nagel et al.
patent: 4484339 (1984-11-01), Mallozzi et al.
patent: 4516253 (1985-05-01), Novak
"X-Ray Emission from Laser Irradiated Plane Solid Targets" by Eidmann et al., Journal of Applied Phys., vol. 47, No. 6, Jun. 1976, pp. 2402-2414.
"Target-Interaction Experiments at 0.53 .mu.m and 0.35 .mu.m" by Nagel et al., Lawrence Livermore Nat. Labs. 1980 Ann. Reports.
"Characteristics of Soft X-Ray Emission from a Plasma . . . " by Bykovskii et al., Sov. J. Quantum Electron, 9(2), Feb. 1979.
Memorandum "Soft X-Ray Emission" by Stomper et al., NRL Memorandum Report 7838, 10-1974.
"Repetitively Pulsed-Plasma Soft X-Ray Source" by Nagel et al., Applied Optics, vol. 23, No. 9, May 1984.
Forsyth James M.
Frankel Robert D.
Barron Harry W.
Church Craig E.
Freeman John C.
Hampshire Instruments, Inc.
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