Locking mechanism for use in a chuck for an optical alignment an

Details Locking mechanism for use in a chuck for an optical alignment an Locking mechanism for use in a chuck for an optical alignment an

1979-11-26

1981-07-14

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

269 21, 269310, 279 3, 355 79, G03B 2760

Patent

active

042783488

ABSTRACT:
A locking device for use in the chuck of an optical alignment and exposure apparatus is disclosed. The locking device comprises a plurality of flat, flexible blades fastened in pairs to a chuck plate in the chuck. Between each pair of blades there is a stationary element fastened to a base member in the chuck. Vacuum cups are fastened to the blades so that the blades are clamped tightly against the stationary element when the vacuum cups are evacuated.

REFERENCES:
patent: 3674368 (1972-07-01), Johannsmeier
patent: 3705769 (1972-12-01), Johannsmeier
patent: 3833230 (1974-09-01), Noll
patent: 3853313 (1974-12-01), Appenzeller et al.
patent: 3858978 (1975-01-01), Johannsmeier

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