Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2011-04-19
2011-04-19
Kim, Robert (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C250S307000, C250S311000
Reexamination Certificate
active
07928384
ABSTRACT:
A charged particle beam device including a function for measuring localized static charges on a sample. A primary charged particle beam scans a sample positioned in a mirror state to acquire an image. The acquired image may be an image of the sample or may be an image of a structural component in the charged particle optical system. The acquired image is compared with a standard sample image and the localized static charge is measured.
REFERENCES:
patent: 6521891 (2003-02-01), Dotan et al.
patent: 6653631 (2003-11-01), Nishimura
patent: 6667476 (2003-12-01), Todokoro et al.
patent: 6828571 (2004-12-01), McCord et al.
patent: 2002/0179851 (2002-12-01), Sato et al.
patent: 2004/0124364 (2004-07-01), Sato et al.
patent: 2007/0040118 (2007-02-01), Cheng et al.
patent: 2007/0221845 (2007-09-01), Komuro et al.
patent: 2008/0302963 (2008-12-01), Nakasuji et al.
patent: 2009/0272899 (2009-11-01), Yamazaki et al.
patent: 2010/0006755 (2010-01-01), Sato et al.
Cheng Zhaohui
Omori Seiko
Yano Tasuku
A. Marquez, Esq. Juan Carlos
Hitachi High-Technologies Corporation
Kim Robert
Maskell Michael
Stites & Harbison PLLC
LandOfFree
Localized static charge distribution precision measurement... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Localized static charge distribution precision measurement..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Localized static charge distribution precision measurement... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2676794