Loadlock cassette with wafer support rails

Details Loadlock cassette with wafer support rails Loadlock cassette with wafer support rails

1996-11-18

1999-05-18

Brown, Peter Toby

Active solid-state devices (e.g., transistors, solid-state diode

Housing or package

414217, H01L23/02

Patent

active

059053020

ABSTRACT:
The present invention provides a wafer cassette generally comprising one or more wafer support plates defining two or more coplanar wafer seats, a movable stem supporting the wafer support plates, and an actuating member connected to the stem to move the wafer support plates.

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patent: 5363872 (1994-11-01), Lorimer
patent: 5469035 (1995-11-01), Lowrance
patent: 5494494 (1996-02-01), Mizuno et al.
patent: 5505779 (1996-04-01), Mizuno et al.
patent: 5708755 (1998-01-01), Gronet et al.

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