Load sensor with use of crystal resonator

Details Load sensor with use of crystal resonator Load sensor with use of crystal resonator

2005-04-19

2005-04-19

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

C310S353000

Reexamination Certificate

active

06880407

ABSTRACT:
Excitation electrodes are respectively affixed to central portions of both surfaces of a long plate-shaped AT-cut crystal resonator, the central portion starts a thickness shear oscillation in the length direction of the crystal resonator when an electric signal is applied to the central portion of the crystal resonator through the excitation electrodes. And, channel-shaped, half-circular-shaped, or trapezoid grooves in cross-section are respectively formed in the plate width direction on middle portions between the center portion and end portions of the crystal resonator. These grooves are formed so as to be symmetrical with respect to a thicknesswise central position of the crystal resonator through a well-known etching technique such as photo-etching and the like.

REFERENCES:
patent: 4126801 (1978-11-01), Corbett
patent: 4135108 (1979-01-01), Besson
patent: 4175243 (1979-11-01), Corbett
patent: 4486681 (1984-12-01), Ishigami et al.
patent: 4644804 (1987-02-01), Ramm et al.
patent: 0 052 318 (1982-05-01), None
patent: 2 013 631 (1970-04-01), None
patent: 2 142 430 (1984-06-01), None
R. A. Watson, “Force Sensor Crystal Mounting,” IBM Technical Disclosure Bulletin, vol. 10, No. 4 (Sep. 1967).
T. Ueda et al., “Precision Force Transducers Using Mechanical Resonators,”Measurement, vol. 3, No. 2 (Apr. 1985).
European Search Report, EP 02 25 3940, issued Jul. 31, 2003.

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