Coating apparatus – Gas or vapor deposition – Chamber seal
Patent
1984-05-10
1985-08-13
Morgenstern, Norman
Coating apparatus
Gas or vapor deposition
Chamber seal
118719, 118500, 118729, 204298, 414217, C23C 1308
Patent
active
045343144
ABSTRACT:
In a vacuum system for processing workpieces, a vacuum chamber has a workpiece-entrance opening. Load lock means for said entrance opening include a door for sealing the outside of said opening, a movable closure member within the chamber to seal the entrance opening from the interior of the vacuum chamber, and forming a load lock chamber when the door and closure member are both in closed positions. The load lock chamber is connected to a roughing pump and is separately connected to a high vacuum pump through a pumping opening in one or the other of said internal closure member or said door. A large aperture valve is provided in said pumping opening. In one embodiment said pumping opening is connected via suitable conduits and valves to a roughing pump and also to a high vacuum pump. In another embodiment said pumping opening is connected only to the high vacuum pump, and the roughing pump is connected to the load lock chamber via an aperture in the edge of the entrance opening in the processing chamber wall.
REFERENCES:
patent: 3649339 (1972-03-01), Smith
patent: 3856654 (1974-12-01), George
patent: 3931789 (1976-01-01), Kakei et al.
patent: 3981791 (1976-09-01), Rosvold
patent: 4201152 (1980-05-01), Luscher
patent: 4226208 (1980-10-01), Nishida et al.
patent: 4306731 (1981-12-01), Shaw
patent: 4311427 (1982-01-01), Coad et al.
Cole Stanley Z.
Morgenstern Norman
Plantz Bernard F.
Varian Associates Inc.
Warsh Kenneth L.
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