Load lock chamber with heater in tube

Details Load lock chamber with heater in tube Load lock chamber with heater in tube

2007-07-24

2010-10-26

Campbell, Thor S (Department: 3742)

Electric resistance heating devices

Heating devices

Radiant heater

C392S424000

Reexamination Certificate

active

07822324

ABSTRACT:
Embodiments of the invention include a heated load lock chamber. In one embodiment, a heated load lock chamber includes a chamber body having a plurality of lamp assembles disposed at least partially therein. Each lamp assembly includes a transmissive tube housing a lamp. The transmissive tube extends into the chamber body and provides a pressure barrier isolating the lamp from the interior volume of the load lock chamber. In another embodiment, an open end of the transmissive tube extends through a sidewall of the chamber body. A closed end of the transmissive tube is surrounded by the interior volume of the chamber body and is supported below a top of the chamber body in a spaced apart relation. The open end of the tube is sealed to the sidewall of the chamber body such that the interior of the tube is open to atmosphere.

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PCT International Search Report and Written Opinion dated Oct. 23, 2008 for International Application No. PCT/US2007/75699.

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