Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2006-09-05
2006-09-05
Ackun, Jr., Jacob K. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S339000
Reexamination Certificate
active
07101253
ABSTRACT:
A load cup for transferring a substrate in a chemical mechanical polishing system is provided. In one embodiment, a load cup for transferring substrates in a chemical mechanical polishing system includes a substrate support having a first side adapted to support a substrate thereon and at least one actuator coupled to the substrate support and adapted to move the substrate support laterally. In another embodiment, a method for transferring a substrate between a polishing head and a load cup includes sensing a position of the polishing head relative to the load cup and automatically aligning the load cup and polishing head in response to the sensed relative position.
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Ackun Jr. Jacob K.
Applied Materials Inc.
Moser Patterson & Sheridan
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