Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1999-07-21
2000-12-05
Jordan, Charles T.
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419211, 20419215, 20429804, 20429812, 20429813, 20429816, 20429819, 2042982, 20429823, 20429826, 20429828, C23C 1400
Patent
active
H00019240
ABSTRACT:
Nanocrystalline carbide/diamond-like carbon composite films and synthesis method near room temperature are described wherein combined magnetron sputtering and pulsed laser ablation produce plasma fluxes intersecting on a substrate surface to form metal carbide and diamond-like carbon composite films of about 10 to 50 nm carbide crystallites encapsulated in a sp.sup.3 bonded amorphous diamond-like carbon matrix having a hardness of about 32 GPa and high plasticity, high toughness in contact loading and low friction coefficient.
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Prasad Somuri V.
Voevodin Andrey A.
Zabinski Jeffrey S.
Baker Aileen J.
Jordan Charles T.
Kundert Thomas L.
Scearce Bobby D.
The United States of America as represented by the Secretary of
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