Lithographic projection apparatus with collector including...

Details Lithographic projection apparatus with collector including... Lithographic projection apparatus with collector including...

2004-04-06

2009-02-10

Kim, Peter B (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

Reexamination Certificate

active

07489385

ABSTRACT:
An optical system includes a radiation source and at least one collector located in the vicinity of the radiation source. The collector is arranged to collect the radiation to provide a beam of radiation. The at least one collector includes a first reflector on a concave surface and a second reflector on a convex surface, the concave surface surrounding the convex surface.

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