Optics: image projectors – Composite projected image
Reexamination Certificate
2008-06-10
2008-06-10
Fuller, Rodney E (Department: 2862)
Optics: image projectors
Composite projected image
C353S053000
Reexamination Certificate
active
07384149
ABSTRACT:
A lithographic projection apparatus includes a support configured to support a patterning device, the patterning device configure to pattern the projection beam according to a desired patter. The apparatus has a substrate table configure to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge gas supply system configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system includes a purge gas mixture generator configured to generate a purge gas mixture which includes at least one purging gas and a moisture. The purge gas mixture generator has a moisturizer configured to add the moisture to the purge gas and a purge gas mixture outlet connected to the purge gas mixture generator configured to supply the purge gas mixture near the surface.
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Spiegelman Jeffrey J.
Van Bragt Johannus Josephus
Van Der Net Antonius Johannes
ASML Netherlands B.V.
Entegris, Inc.
Fuller Rodney E
Pillsbury Winthrop Shaw & Pittman LLP
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