Lithographic projection apparatus, device manufacturing...

Details Lithographic projection apparatus, device manufacturing... Lithographic projection apparatus, device manufacturing...

2005-03-01

2005-03-01

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S067000

Reexamination Certificate

active

06862075

ABSTRACT:
Contaminant particles travelling with a projection beam in a lithographic projection apparatus are ionized. A purge gas may be attracted towards getter plates provided upstream of the purge gas supply. A magnetic field traps electrons generated by the ionizer to improve the ionization of the purge gas. The contaminant particles can be ionized by generating a plasma in a tube having a greater length than width.

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