Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2008-07-29
2008-07-29
Vanore, David A. (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S365000, C250S370080, C250S370090, C250S372000, C250S461100, C359S350000
Reexamination Certificate
active
07405417
ABSTRACT:
A lithographic apparatus is disclosed. The apparatus includes a projection system configured to project a first radiation beam onto a target portion of a substrate, and at least one monitoring device for detecting contamination in a interior space. The monitoring device includes at least one dummy element having at least one contamination receiving surface. In an aspect of the invention, there is provided at least one dummy element which does not take part in transferring a radiation beam onto a target portion of a substrate, wherein it is monitored whether a contamination receiving surface of the dummy element has been contaminated.
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Banine Vadim Yevgenyevich
Moors Johannes Hubertus Josephina
Stevens Lucas Henricus Johannes
Wolschrijn Bastiaan Theodoor
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Souw Bernard
Vanore David A.
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