Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2008-01-22
2008-01-22
Lee, Diane (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000
Reexamination Certificate
active
07321416
ABSTRACT:
The present invention comprises a lithographic apparatus and device manufacturing method method that uses a patterning device that increase a number of individually controllable elements that are programmed simultaneously to increase an update rate of an array of individually controllable elements. A number of required high speed analog inputs to the array is reduced. The complexity of the array is reduced and the maximum update speed of the array is increased. Furthermore, the number of elements within an array can be readily expanded. The patterning device can be divided into a plurality of groups of cells and the lithographic apparatus can comprise a plurality of supply channels. Each supply channel can be arranged to provide a voltage signal to each cell in a respective group of cells. This can reduce the number of required inputs to the patterning device for individually addressing each cell.
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Search Report, dated Nov. 24, 2006, for European Patent Application No. 06252985.4, 9 pages.
Chilov Kamen Hristov
Kemper Petrus Wilhelmus Josephus Maria
Kessels Lambertus Gerardus Maria
Makarovic Andrej
Nihtianov Stoyan
ASML Netherlands B.V.
Lee Diane
Liu Chia-how Michael
Sterne Kessler Goldstein & Fox PLLC
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