Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2004-07-20
2008-09-09
Lee, Diane I. (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C355S076000, C430S005000
Reexamination Certificate
active
07423733
ABSTRACT:
The invention pertains to a lithographic apparatus that includes a docking system for positioning a patterning device, such as a reticle, relative to the reticle stage. The lithographic projection apparatus has an operational cycle that includes a projection phase, in which the reticle stage carries the patterning device and an exchange phase, in which the patterning device is exchanged and the docking system positions the patterning device relative to the reticle stage. The docking system is configured to be spaced from the patterning device during the projection phase in order to ensure that a higher accuracy of the projected image is obtained.
REFERENCES:
patent: 4598242 (1986-07-01), Hayashi et al.
patent: 4760429 (1988-07-01), O'Connor
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5544213 (1996-08-01), Chiba et al.
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 6046792 (2000-04-01), Van Der Werf et al.
patent: 6260282 (2001-07-01), Yuan et al.
patent: 2002/0043163 (2002-04-01), Novak
patent: 1 237 045 (2002-09-01), None
patent: 1237045 (2002-09-01), None
patent: 6-53116 (1994-02-01), None
patent: 7-153663 (1995-06-01), None
patent: 11-184095 (1999-07-01), None
patent: 2000-36531 (2000-02-01), None
patent: WO 98/33096 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None
patent: WO 98/40791 (1998-09-01), None
Heerens Gert-Jan
Lansbergen Robert Gabriël Maria
Leenders Martinus Hendrikus Antonius
Loopstra Erik Roelof
Van De Ven Bastiaan Lambertus Wilhelmus Marinus
ASML Netherlands B.V.
Lee Diane I.
Liu Chia-how Michael
Pillsbury Winthrop Shaw & Pittman LLP
LandOfFree
Lithographic apparatus, device manufacturing method, and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Lithographic apparatus, device manufacturing method, and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithographic apparatus, device manufacturing method, and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3967327