Lithographic apparatus, device manufacturing method, and...

Details Lithographic apparatus, device manufacturing method, and... Lithographic apparatus, device manufacturing method, and...

2008-07-08

2008-07-08

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C355S030000, C355S053000

Reexamination Certificate

active

11451352

ABSTRACT:
A lithographic projection apparatus includes conduits which supply utilities to components in a vacuum chamber such as object tables and/or associated motors and/or sensors. The conduits are shielded from exposure to the vacuum by conduit conducts having at least the same number of degrees of freedom as their associated object table.

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Japanese Official Action issued for Japanese Patent Application No. 2001-359396, dated Jul. 7, 2006.

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