Lithographic apparatus, device manufacturing method, and...

Details Lithographic apparatus, device manufacturing method, and... Lithographic apparatus, device manufacturing method, and...

2006-02-07

2006-02-07

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S441110, C250S442110

Reexamination Certificate

active

06995379

ABSTRACT:
A lithographic projection apparatus in which a vacuum chamber provided with a vacuum generator constructed and arranged to generate a vacuum beam path for the projection beam, wherein the apparatus is provided with a collision protection apparatus for reducing the effects of a collision of an object table with the wall of the vacuum chamber or with another object table. These collisions may occur during a power failure or an error in a programmed control logic in a controller of the apparatus.

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