Lithographic apparatus, device manufacturing method, and...

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports

Reexamination Certificate

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C355S030000, C355S053000

Reexamination Certificate

active

07397040

ABSTRACT:
A lithographic projection apparatus includes conduits which supply utilities to components in a vacuum chamber such as object tables and/or associated motors and/or sensors. The conduits are shielded from exposure to the vacuum by conduit conducts having at least the same number of degrees of freedom as their associated object table.

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