Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-10-03
2006-10-03
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000, C359S820000
Reexamination Certificate
active
07116399
ABSTRACT:
A lithographic projection apparatus contains a projection system configured to project a patterned beam of radiation onto a target portion of a substrate. The projection system contains one or more optically active mirrors and heat shields located to intercept heat radiation to or from the mirrors and/or their support. The heat shields are actively cooled and the mirrors and the heat shields and the mirrors are supported separately on a support frame to reduce vibration of the mirrors due to active cooling. The heat shields may include heat shields that intercept heat radiation to or from the support and/or respective heat shields for individual mirrors that intercept heat radiation to or from the mirrors.
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Box Wilhelmus Josephus
Franken Dominicus Jacobus Petrus Adrianus
Leenders Martinus Hendrikus Antonius
Loopstra Erik Roelof
Smits Josephus Jacobus
ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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