Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-04-18
2006-04-18
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S055000
Reexamination Certificate
active
07030961
ABSTRACT:
During device manufacturing, a beam of radiation is projected onto a substrate via a mask. The substrate is aligned with the mask using an alignment structure on the substrate, with properties of the light reflected from (or transmitted by) the alignment structure being used to determine the relative position of the substrate. Earlier processing of the substrate may cause errors in the position determined from the reflected light. In one embodiment of the invention, measurement of properties of the reflected light are used to determine a correction for errors caused by processing of the substrate. Parameters of a physical model of the alignment structure may be estimated from the reflected light and used to determine the correction. Amplitudes of a plurality of different diffraction peaks may be measured to determine the correction.
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Article entitled Exploiting Structure in Positioning of Non-Symmetric Signals, written by Ghazanfarian et al.
Den Boef Arie Jeffrey
Mos Everhardus Cornelis
Van Der Schaar Maurits
ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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