Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-07-11
2006-07-11
Nguyen, Kiet T. (Department: 2881)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S055000
Reexamination Certificate
active
07075620
ABSTRACT:
A lithographic projection apparatus includes a radiation system for providing a projection beam of radiation having a wavelength λ1smaller than 50 nm; a support structure for supporting patterning structure, the patterning structure serving to pattern the projection beam according to a desired pattern; a substrate table for holding a substrate; and a projection system for projecting the patterned beam onto a target portion of the substrate. The apparatus further includes a radiation sensor which is located so as to be able to receive radiation out of the projection beam, said sensor comprising a radiation-sensitive material which converts incident radiation of wavelength λ1into secondary radiation; and sensing means capable of detecting said secondary radiation emerging from said layer.
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Banine Vadim Yevgenyevich
Keur Wilhelmus Cornelis
Kroon Mark
Loopstra Erik Roelof
Moors Johannes Hubertus Josephina
ASML Netherlands B.V.
Nguyen Kiet T.
Pillsbury Winthrop Shaw & Pittman LLP
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