Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2005-08-16
2005-08-16
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S071000, C355S053000
Reexamination Certificate
active
06930760
ABSTRACT:
In a lithographic projection apparatus, a grating spectral filter is used to filter an EUV projection beam. The grating spectral filter is preferably a blazed, grazing incidence, reflective grating. Cooling channels may be provided in or on the rear of the grating spectral filter. The grating spectral filter may be formed of a material effectively invisible to the desired radiation.
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patent: 5999247 (1999-12-01), Tezuka
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Bakker Levinus Pieter
Banine Vadim Yevgenyevich
Leenders Martinus Hendrikus Antonius
Van Elp Jan
Visser Hugo Matthieu
ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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