Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2006-07-06
2009-11-03
Vanore, David A (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S492100, C250S492200, C250S493100, C250S503100, C250S3960ML, C250S461100, C355S030000, C378S034000, C359S309000, C156S345480, C156S345500
Reexamination Certificate
active
07612353
ABSTRACT:
A lithographic apparatus includes a radiation system including a radiation source for the production of a radiation beam, and a contaminant trap arranged in a path of the radiation beam. The contaminant trap includes a plurality of foils or plates defining channels that are arranged substantially parallel to the direction of propagation of said radiation beam. The foils or plates can be oriented substantially radially with respect to an optical axis of the radiation beam. The contaminant trap can be provided with a gas injector which is configured to inject gas at least at two different positions directly into at least one of the channels of the contaminant trap.
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European Search Report issued for European Patent Application No. 06076366.1—2222, dated Apr. 24, 2007.
Banine Vadim Yevgenyevich
Brom Paul Peter Anna Antonius
Schmidt Alexander Alexandrovitch
Sjmaenok Leonid Aizikovitch
Smits Josephus Jacobus
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Sahu Meenakshi S
Vanore David A
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