Lithographic apparatus, apparatus cleaning method, device...

Details Lithographic apparatus, apparatus cleaning method, device... Lithographic apparatus, apparatus cleaning method, device...

2005-02-15

2005-02-15

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

Reexamination Certificate

active

06856376

ABSTRACT:
In a low-pressure environment, a voltage is applied between a tool tip in close proximity to a surface and that surface. Contaminants on the surface are attracted and adhere to the tool. A laser may also be used for in situ cleaning of components of a lithographic projection apparatus.

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