Lithographic apparatus and position sensor

Details Lithographic apparatus and position sensor Lithographic apparatus and position sensor

2007-07-10

2010-11-09

Glick, Edward J (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C324S207220

Reexamination Certificate

active

07830495

ABSTRACT:
A lithographic apparatus having a stationary magnet motor to drive a support such as a substrate support or a patterning device support, may be provided with a measurement system to measure a position of the support in question, e.g., to provide a safety system to prevent a collision of the support with another part. The measurement system may be configured to measure a magnetic field strength of an alternating magnetic field generated by the magnet assembly of the stationary magnet motor, and/or measure generation of eddy currents in a metallic layer shielding the magnet assembly in combination with an inductance measurement of an electromagnet generating the alternating magnetic field causing the eddy currents, and/or measure light using an optical position sensitive sensor such as a CCD metric or linear photodiode positioned in a light plane emitted by an emitter.

REFERENCES:
patent: 5493216 (1996-02-01), Asa
patent: 2005/0077786 (2005-04-01), De Weerdt
patent: 2006/0208726 (2006-09-01), Mock et al.

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